Physical Laboratory: SNF is housed in the Paul Allen Center for Integrated Systems (CIS) building. Completed in 1985, this building and facility were generously funded by the twenty founding industrial members of the CIS program (still strongly active today in supporting academic research at Stanford.)

The Facility extends over three floors. The class 100 cleanroom is 10,500 square feet in area and is vibration-isolated from the rest of the CIS building. Air handlers and head exchangers are located in the floor above the cleanroom. Support equipment, such as chilled water, vacuum pumps, air compressors, and acid waste neutralizers, are remotely located in the basement below. Corrosive and toxic gases are located in a monitored gas pad, away from the main laboratory. The DI water plant, liquid gas storage tanks, and emergency power generators are located in an outdoor area adjacent to the CIS building. Support facilities, such as the stockroom, semiclean labs and maintenance work areas, and staff offices, are located near the cleanroom.

Labmembers: There are over 600 registered labmembers at the SNF; over 200 actively use the facility in any given calendar month. Labmembers come from a wide variety of institutions: Stanford University and SLAC (61%), other universities and colleges (13%), industry & government (25%) and other institutions (1%) (data from 1999). Last year, labmembers logged in about 50k hours of lab time. Although the vast majority of labmembers are on-site users of the SNF, a small percentage are "remote users" whom the technical liaisons and process staff will support in their research projects. For detailed information on how to become a labmember, click <here>.

Organization: For an organization chart list, click <here>.

Laboratory Program Sponsorship: The Stanford Nanofabrication Facility is a member of the National Nanotechnology Infrastructure Network (NNIN) that is sponsored and overseen by the National Science Foundation (NSF). The SNF also receives partial support from the Stanford University Center for Integrated Systems (CIS) and is a member of the CNRI-sponsored MEMS Exchange.