Nanospec Film Thickness Measurement: nanospec

Description: The Nanometrics Nanospec system uses non-contact, spectro-reflectometry (measurement of the intensity of reflective light as a function of incident wavelength) to determine the thickness of transparent films on substrates, such as silicon, that are reflective in the visible range. For an overview of the in-line characterization tools available at SNF, click <here>.


Features:
  • Preprogrammed for standard films.
  • Small sample spot size (down to tens of microns in diameter at 40X objective)

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Stanford Nanofabrication Facility
Last Modified 07/11/2006