Process Info
SVG Photoresist Spin Coater:
svgcoat
Overview of Photolithography Tools
Lithography Process Links
List of Available Photoresists
Shipley 3612 Photoresist
SPR220 Photoresist
Polyimide Photoresist
Lift-off Processing
Photoresist for Implant Processing
Image Reversal Processing
Backside Photoresist Protection
Processing Clear (Glass, Quartz, Sapphire) Substrates
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Stanford Nanofabrication Facility
Last Modified
03/22/2004
