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_______________________________________________________________
Stanford Nanofabrication Facility webmaster@snf.stanford.edu Last Modified 09/02/2003 |
NOTE: You MUST lower the two plastic doors when using SPR220-7 to prevent fumes from getting into the lab!!
The following programs should NOT be changed!
STANDARD PRIME PROGRAM
SVGCOAT HMDS Vapor Prime Oven
STATION: PRIME PROGRAM#1
|
Event |
Operation |
Time |
|
1 |
VBAKE |
010:0 |
|
2 |
PRIME |
005.0 |
|
3 |
VBAKE |
005.0 |
|
4 |
PRIME |
005.0 |
|
5 |
VBAKE |
005.0 |
|
6 |
BAKE |
010.0 |
|
7 |
COOL |
005.0 |
STANDARD COAT PROGRAMS
STATION: COAT PROGRAM# 7 3612 RESIST 1.0um (dispenser 1) with edge bead removal
|
Event |
Operation |
Arm |
Time |
Speed |
Accel |
|
1 |
SPIN |
0 |
02.0 |
4.00 |
40 |
|
2 |
SPIN |
0 |
00.4 |
0.25 |
40 |
|
3 |
DISP1 |
9 |
0.00 |
0.25 |
40 |
| 4 |
SPIN |
5 |
30.0 |
5.50 |
05 |
| 5 | WASH | 6 | 15.0 | 0.50 | 50 |
| 6 | SPIN | 0 | 10.0 | 5.00 | 05 |
|
7 |
END |
0 |
0 |
0 |
0 |
STATION: COAT PROGRAM# 8 3612 RESIST 1.6um (dispenser 1) with edge bead removal
|
Event |
Operation |
Arm |
Time |
Speed |
Accel |
|
1 |
SPIN |
0 |
02.0 |
4.00 |
40 |
|
2 |
SPIN |
0 |
00.4 |
0.25 |
40 |
|
3 |
DISP1 |
9 |
0.00 |
0.25 |
40 |
|
4 |
SPIN |
5 |
30.0 |
2.00 |
05 |
| 5 | WASH | 6 | 20.0 | 0.50 | 50 |
| 6 | SPIN | 0 | 15.0 | 2.00 | 05 |
|
7 |
END |
0 |
0 |
0 |
0 |
STATION: COAT PROGRAM#2 3612 RESIST 1.0um or 1.6um (dispenser 1) without edge bead. NOTE: Only spin speed on event 4 may be changed!!!
|
Event |
Operation |
Arm |
Time |
Speed |
Accel |
|
1 |
SPIN |
0 |
02.0 |
4.00 |
40 |
|
2 |
SPIN |
0 |
00.4 |
0.25 |
40 |
|
34 |
DISP1 |
9 |
0.00 |
0.25 |
40 |
|
4 |
SPIN |
0 |
30.0 |
5.50 ....(1um) OR 2.00 ...(1.6um) |
05 |
|
5 |
END |
0 |
0 |
0 |
0 |
STATION: COAT PROGRAM#3 EBEAM RESIST ONLY!! ( pour resist)
|
Event |
Operation |
Arm |
Time |
Speed |
Accel |
|
1 |
SPIN |
0 |
02.0 |
5.00 |
40 |
|
2 |
SPIN (Dispense here) |
0 |
10.00 |
0.10 |
20
|
|
3 |
SPIN |
0 |
05.0 |
0.25 |
40 |
|
4 |
SPIN |
0 |
30.0 |
5.00 (defines thickness) |
05 |
|
5 |
END |
0 |
0 |
0 |
0 |
You may edit the spin speed ONLY for program #3.
STATION: COAT PROGRAM #4 SPR220-7 RESIST 7.0 um (dispenser #2) with edge bead removal
|
Event |
Operation |
Arm |
Time |
Speed |
Accel |
|
1 |
SPIN |
0 |
02.0 |
5.00 |
40 |
|
2 |
SPIN |
0 |
00.5 |
0.25 |
40 |
|
3 |
DISP2 |
4 |
0.00 |
0.25 |
40 |
|
4 |
SPIN |
7 |
10.0 |
0.50 |
05 |
| 5 |
SPIN |
5 |
40.0 |
3.50 |
05 |
| 6 | WASH | 6 | 30.0 | 0.50 | 50 |
| 7 | SPIN | 0 | 10.0 | 3.50 | 05 |
|
8 |
END |
0 |
0 |
0 |
0 |
STANDARD BAKE PROGRAMS
STATION: BAKE PROGRAM#1 FOR 3612 (1 or 1.6 um) Temp 90C
|
Event |
Operation |
Time |
|
1 |
BAKE |
60.0 |
|
2 |
COOL |
005.0 |
|
3 |
END |
0 |
STATION: BAKE PROGRAM#2 FOR 3612 (Recomended FOR 1.6 um)Temp 90C
|
Event |
Operation |
Time |
|
1 |
BAKE |
120.0 |
|
2 |
COOL |
005.0 |
|
3 |
END |
0 |
STATION: BAKE PROGRAM#3 FOR SPR220-7 (7 um)
(NOTE:Bake at 90C for 200 seconds (Run this off hours only!! )
OR for better results use the
COMBINATION BAKE: 90C for 110 seconds (program 4) followed by a hotplate bake of 100 seconds at 115C.
|
Event |
Operation |
Time |
|
1 |
BAKE |
200.0 |
|
2 |
COOL |
005.0 |
|
3 |
END |
0 |
|
_______________________________________________________________
Stanford Nanofabrication Facility webmaster@snf.stanford.edu Last Modified 09/02/2003 |