Process Info
Diffusion Wet Bench:
wbdiff
Wet Processing Overview
List of Wet Processing Procedures On-line
Chemical Handling Policies at Wet Benches
Wet Etch Rates of Selected SNF Films
Wet Etch Rates in Standard Etchants
Standard Pre-Diffusion Furnace Clean:
<Overview>
<@wbdiff>
Standard Pre-LPCVD or Pre-Metal Deposition Clean:
<Overview>
<@wbdiff>
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Stanford Nanofabrication Facility
Last Modified
07/06/2006
