Gallium Arsenide [GaAs] Wet Bench: wbgaascl

Description: This bench is for Gallium Arsenide [GaAs] processes. GaAs users have priority. Non GaAs work is welcome as space allows.

The Gallium Arsenide wet bench is for acid or base processing of non-standard materials (ie, wafer pieces, devices with gold or non-standard metals). It is also used for non-CMOS compatible processing, such as KOH etching.

Features:
  • Two hot plates for heating solutions in beakers
  • Separate drain for HF waste disposal


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Stanford Nanofabrication Facility
Last Modified 07/06/2006