Process Info
Metal Wet Bench:
wbmetal
Wet Processing Overview
List of Wet Processing Procedures On-line
Chemical Handling Policies at Wet Benches
Wet Oxide Etch at wbmetal
Wet Etch Rates of Selected SNF Films
Wet Etch Rates in Standard Etchants
Standard Clean for Wafers w/Std Metals:
<Overview>
<@wbmetal>
Resist Strip
Triton X-100 Treatment of Buffered Oxide Etchants (BOE)
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Stanford Nanofabrication Facility
Last Modified
07/11/2006
