Process Info
Nonmetal Wet Bench:
wbnonmetal
Wet Processing Overview
List of all Wet Processing Procedures On-line
Chemical Handling Policies at Wet Benches
Wet Oxide Etch
Wet Etch Rates of Selected SNF Films
Wet Etch Rates in Standard Etchants
Triton X-100 Treatment of Buffered Oxide Etchants (BOE)
Resist Strip
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Stanford Nanofabrication Facility
Last Modified
07/11/2006