ZYGO White-Light 3D Surface Profiler: zygo


Description: The Zygo White-Light 3D Surface Profiler provides fast, non-destructive, quantitative surface characterization of step heights, texture, roughness, and other surface topography parameters. The measurement technique is non-contact, three-dimensional, scanning white light and optical phase-shifting interferometry.

The Zygo is based on scanning white-light interferometry, a traditional technique in which a pattern of bright and dark lines (fringes) result from an optical path difference between a reference and a sample beam. Incoming light is split inside an interferometer, one beam going to an internal reference surface and the other to your sample. After reflection, the beams recombine inside the interferometer, undergoing constructive and destructive interference and producing the light and dark fringe pattern. .

  • Available objectives are: 2.5X, 10X, 20X, and 50X with additional zoom from 0.5 to 2X
  • Field of view ranges from 0.14 x 0.11mm (50X) to 2.82 x 2.11mm (2.5X)
  • Vertical resolution is 0.1 nm
  • Minimum lateral resolution is 0.22 µm (50X objective, 2X zoom)

 

For an overview of the in-line characterization tools available at SNF, click <here>.

Sample Zygo Images

For additional information about other Zygo products, you can visit www.zygo.com or contact Brian Harrison, Account Manager, or for technical support contact Rishi Mulgund, Applications Engineer, at (408) 434-1000.

 

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Stanford Nanofabrication Facility
Last Modified 07/11/2006