(Next Meeting: Friday, April 4, 11:30-1 in CIS 101.)

3/21 Meeting summary:

1. Maskmaking: Latest info about submitting mask making requests was reviewed. Updated information will be posted on the website shortly. Any questions, get in touch with Mary, Ed, or Mahnaz.

2. Coral Data Entry: John demonstrated the data entry on the Coral test system for metal tools, as per J's request from last meeting. It is remarkably flexible and can be very effective, if we are careful about the data to be collected.

3. Quality Circle Activities: General discussion about how to proceed next with quality circle activities. Lots of action items - see below.

4. Process Brainstorming: Matt Kerby solicited feedback about his process for nanopore holes in microfluidic channels. If anyone has further suggestions for Matt, please get in touch with him (mkerby@snf).

Action items for next meeting:

1. Functional area teams: Each team (whose membership is described below) should meet and do the following:
   • Choose one "model" or "test" tool. Staff will provide equipment and monitor history for the tool, as appropriate.
   • Define (if not done already) process qual expectations for this model tool.
   • Map out Coral data collection for this model tool (process qual, standard run, or custom run)
   • Define when process quals should be done (scheduled basis, during training and/or following equipment repair/maintenance)
   • Define superuser responsibilities for this tool (training, process or equipment troubleshooting, etc., as appropriate)

Functional Improvement Teams:

• Litho Area: Aaron (organizer) J., Il Woong, Steve Z., Renata, Nahid, Maryam (Staff members: Mahnaz, Gary, Mario)
• Etch: Nahid (organizer), Tom, J., Il Woong, Renata, Maryam, Steve Z., Ray (Staff members: Nancy, Elmer, Mike)
• epi/epi2: Onur & Renata (organizers), Raja (Staff members: Maurice, Elmer)
• RTA: Raja (organizer), Tom, Serene (Staff members: Ed, Elmer)
• Furnaces: Maryam (organizer), J., Ray, Il Woong, Renata, Raja (Staff members: Nancy, Maurice, Ted, Ray)
• Metals: J. (organizer) (Staff members: Jeannie, Jim)

Action items from previous weeks:

• Coral inputs: Each functional area team should map out its "process expectations" from this week's meeting into the framework outlined above. Try to be specific in the data fields to be collected, whether the field is required or forced, and any pull-downs, keeping in mind how users would use this. Done for 3 areas (need litho, furnaces, etch.)
  
  
• Coral outputs: Each functional area team should describe how they would like to be able to access and view the data.
  
  
• Process expectations: The organizer from each group should work with labmember volunteers to come up with criteria for process performance. This should include a specification of what a "standard process" is for a given tool and how the monitor is done (i.e., wafer prep, measurement method, reporting, etc.) It should be general enough to serve as a gage of equipment performance (i.e., test all critical functions, such as gas flows, pressure, temperature, whatever) but specific enough to be applicable to most users' needs. Mostly done.
  
  
• Current trend data: Data is currently being done on a number of tools. Data will be provided to each of the volunteer groups (Mary) Done. (mostly)
  
  
• Equipment problem reports: Coral data for uptime and availability will be provided to each of the volunteer groups (Mary.) Updated reports to be distributed.

- ASML/SNF: ASML to provide specs on wafer curvature and handling. SNF to post on local server for users. (In progress -- and in parallel, ASML is collecting data from wafers in-house.)

- ASML/Mahnaz/Epi users: Test curved-wafer to handle-wafer method, where handle-wafer has a trimmed flat. (Not yet done.)

- ASML/Gary S: Gary can now retrieve wafers short of the e-chuck. (Partly done.)

- ASML/SNF: Build an alignment jig for device-wafer to handling-wafer mounting. (Not done).

- SNF: Stress gage. Paul R. will help anyone wishing to use the FSM. Investigating repair of the Flexus (Mary.) The Flexus 2320 stress gage has been sent out for repair. ETA, three months.

- SNF: Find a way to monitor the plasma-off problem on stsetch1. (Elmer, Paul R.)

- stsetch users: Report plasma-off (and other) observations on Coral.

- Ed/Nahid: Assemble and share data from last year's REU/RET program. (Mostly done.)

- Ed/SNF: Jim McVittie did some contamination characterization experiments on stsetch1 some years ago. We need to obtain and examine these results. (Not done)

- Ed: Present stsetch2 RSM characterization results (at a future Grand Rounds?)

- Ed/J: Acquire and test cool grease. (Not done.)

- Ed/Mary: Contact other STS etch owners (at NNIN sites and elsewhere) and find out what they do for through wafer etching. (Not done)

- SpecMat:Work to resolve Nahid's request. (Not done)

- Nahid, Mario, Joey, w/input from SNF Staff: Develop an STS etch users survey to gage the user community's needs for DRIE. Survey should include questions about: substrate size requirements; substrates (SOI or not?); etch depth; minimum CD feature requirements (whether CD loss will be acceptable); contamination requirements/acceptable contamination levels; etc. Done. Summary report to follow.