Approval for processing silver-containing substrates is on a CASE BY CASE BASIS ONLY (see: SpecMat) Given the approval for processing, silver may be allowed in the following equipment:

• Lithography and approved analytical tools (click for list) - Follow appropriate procedures for photoresist cleaning to ensure against contaminating litho and analytical equipment.
• General-use wet-benches (click for list) - Use personal, designated glassware to minimize risk of cross-contamination.
• Only these tools in the Gold-contaminated Equipment Group - Wafers are considered gold contaminated following processing in any equipment in this group. Although antimony may be present on the substrates, NO ETCHING of antimony may take place in plasma etching tools.
  
  evbond
  mrc
  wafersaw