Chemical

Date

BINDER Location

COMMENTS

1-Methoxy-2-propanol
(PropyleneGlycolMonomethylEther)

12-8-96

Solvents ?

1-1-1 Trichlorethane (TCA)

3-28-92

Bubblers & Gases

(tylans)

1165 Edge Bead Remover

2-26-99

Removers & Strippers

Shipley Microposit

1805 Resist

6-11-98

Coatings - Resists

Shipley Microposit

1813 Resist

6-11-98

Coatings - Resists

Shipley Microposit

2-ethoxyethanol

Solvents

2-Propanol

See: Isopropyl Alcohol

6:1 Buffered Oxide Etch
(6:1 BOE)

8-18-99

Etchants

20:1 Buffered Oxide Etch
(20:1 BOE)

8-11-97

Etchants

5214 E Resist

Coatings - Resists

Shipley Microposit

9500 Photodielectric

8-18-99

Coatings -- Resists

Shipley Microposit

A

AP3000

3-26-99

Coatings - Adhes. Prom.

AP8000

6-28-99

Coatings - Adhes. Prom.

APEX-E 2408

10-25-94

Coatings - Resists

Shipley DUV PR

AZ 300 MIF Developer

8-13-97

Developers

Hoechst Celanese

AZ 400K

12-1-88

Developers

Hoechst Celanese

AZ 1505 Photoresist

1-14-97

Coatings - Resists

Hoechst Celanese

AZ 4620

12-7-88

Coatings - Resists

Hoechst Celanese

AZ Barli II 90

7-1-98

Coatings - ARC

Hoechst Celanese

AZ Developer

01-06-00

Developers

Hoechst Celanese

AZ EBR Solvent

2-27-92

Removers & Strippers

Hoechst Celanese

Accuglass 111 Spin On Glass

1-27-93

Coatings - Glass (Spin On)

Acetic Acid, Glacial (CH₃COOH)

2-14-97

White Binder

Acetone (CH₃)

7-14-95

Solvents

Algaecide (Aqua Treat A806)

10-89

White Binder

Aluminum

1-2-91

White Binder

(sputter systems)

Aluminum + 1% Silicon

1-28-00

White Binder

(sputter systems)

Aluminum Etch II

1-24-97

Etchants

Olin

Ammonia (NH₃)

9-28-99

Bubblers & Gases

(nitride, stsdep, PWS)

Ammonium Fluoride, 40%

2-11-97

White Binder

Ammonium Hydroxide
(NH₄OH), 28-30%

4-80

White Binder

Ammonium Sulfide Solution

9/2/97

White Binder

Fisher

Apex E

10-25-94

Coatings --Resists

Argon (Ar)

9-28-99

Bubblers & Gases

Arsine (AsH₃) 100 ppm in H₂

9-28-99

Bubblers & Gases

(epi)

Arsine (AsH₃) 15% in H₂

9-28-99

Bubblers & Gases

(implanter)

B

Benzene

Solvents

Boron Tribromide (BBr₃)

9-83

Bubblers & Gases

(tylan5)

Boron Trichloride (BCl₃)

9-28-99

Bubblers & Gases

(plasmaquest)

Boron Trichloride (BCl2)
balanced in Argon

Bubblers & Gases

Gibbons Group (CISX 113)

Boron Trifluoride (BF₃)

9-28-99

Bubblers & Gases

(implanter)

Brake Fluid

White Binder

B-staged divinylsiloxane-bis-
benzocyclobutene

12-9-97

Solvents

(in Cyclotene 3022)

Butyl Acetate

White Binder

C

CD 26

2-6-97

Developers

CR-14 Chromium Etchant

2-17-95

Etchants

Carbon Dioxide (CO₂)

11-18-87

Bubblers & Gases

(basement)

Carbon Tetrachloride

12-80

Solvents

Chlorine (Cl₂)

5-16-97

Bubblers & Gases

(p5000, lampoly?)

Chlorobenzene

11-22-95

Solvents

Chromium Trioxide

11-6-97

White Binder

Citric Acid

11-18-92

White Binder

Cleaner Laboratory (Micro)

White Binder

Compressed Air, oil free

Bubblers & Gases

Close Loop Treatment (540)

White Binder

Aqua Treat

Cooling Water Microbiocide (A-806)

10-87

White Binder

Aqua Treat

Cooling Water Treatment (C-589)

10-87

White Binder

Aqua Treat

Copper

White Binder

Copper FB Plating Solution

5-30-86

Plating

Technic, Inc.

Copper (II) Hexafluoroacetylacetonate

12-7-89

White Binder

Copper "U" Solution

5-5-92

Plating

Technic, Inc.

Cuppric Nitrate, n-Hydrate

12-8-96

White Binder

Cyclohexanone

11-19-90

White Binder

Cyclotene 3022
Advanced Electronics Resin

1-16-98

Coatings - Polyimides

Dow

D

DE 9040

3-15-96

Developers

HD MicroSystems

Diborane (B₂H₆) 1% in H₂

9-28-99

Bubblers & Gases

(epi)

Diborane (B₂H₆) 100 ppm in H₂

9-28-99

Bubblers & Gases

(epi)

Dichlorosilane (SiH₂Cl₂)

8-83

Bubblers & Gases

(epi, tylannitride)

Diethylsilane

11-23-88

Bubblers & Gases

(TEOS)

Disilane (Si₂H₆)

11-14-97

Bubblers & Gases

(tylan8 SiGe)

E

EDP - PSE 300 Etchant

3-3-92

Etchants

EMT130T

2-14-98

Removers & Strippers

Ethyl Alcohol

1-24-92

Solvents

Ethylene Glycol

5-10-96

White Binder

F

Flare (Spin-on dielectric Polymer)

9-28-00

Coating

Allied Signal/Honeywell

Fomblin Y 06/6 (vacuum pump oil)

6-11-87

White Binder

Fomblin Y 14/6 (vacuum pump oil)

6-11-87

White Binder

Fomblin Y 16/6 (vacuum pump oil)

8-85

White Binder

Fomblin Y 18/8 (vacuum pump oil)

8-85

White Binder

Fomblin Y 25/6 (vacuum pump oil)

6-11-87

White Binder

Forming Gas (10% H₂ in N₂)

9-28-99

Bubblers & Gases

(RTA, PSW)

G

Gallium Arsenide (crystalline) wafers

4-15-85

White Binder

Gallium Metal

8-1-90

White Binder

Germane (GeH₄) 100%

8-2-96

Bubblers & Gases

(epi, tylan8 SiGe)

Gold

9-28-99

White Binder

Gold Cyanide Plating Solution 434 RTU

1-20-98

Plating

Technic, Inc.

Gold Etch

Etchants

Olin

Gold Etchant Type TFA

6-92

Etchants

Transene

H

Hg Absorb (contains lead)

8-25-87

White Binder

HMDS (100%)

12-1-88

Coatings - Adhes. Prom.

KTI

HMDS ( 20%) C-20

12-3-95

Coatings - Adhes. Prom.

Microprime

HMDS ( 20%) P-20

Coatings - Adhes. Prom.

Microprime

Halocarbon 13 (CClF₃)

Bubblers & Gases

(basement)

Halocarbon 13B1/Freon 13B1
Bromotrifluoromethane (CBrF₃)

10-95

Bubblers & Gases

(basement/drytek4)

10-97

Bubblers & Gases

(basement)

Halocarbon 22 (CHClF₂)

9-28-99

Bubblers & Gases

(basement)

Halocarbon 23/Trifluoromethane
(CHF₃)

11-98

Bubblers & Gases

(basement)

9-28-99

Bubblers & Gases

(basement)

9-28-99

Bubblers & Gases

(basement)

10-15-97

Bubblers & Gases

(basement)

Helium (He)

2-16-81

Bubblers & Gases

(basement)

Hydrobromic Acid, 48%

6-15-93

White Binder

Hydrochloric Acid, 38%

10-29-97

White Binder

Hydrofluoric Acid, 48%

4-10-97

Etchants

Hydrofluoric Acid (50:1)

6-4-98

Etchants

Hydrogen, House

9-28-99

Bubblers & Gases

(service yard)

Hydrogen 2% in Air

1-10-89

Bubblers & Gases

Hydrogen Bromide (HBr)

9-28-99

Bubblers & Gases

(lampoly, p5000)

Hydrogen Chloride (HCl)

6-13-90

Bubblers & Gases

(epi)

Hydrogen Peroxide, 30%

3-30-96

White Binder

IJK

Isopropyl Alcohol (IPA/2-Propanol)

Solvents

L

LDD-26W

1-27-99

Developers

Shipley Microposit

LOL2000

3-29-99

Coatings -- Resists

Shipley Microposit

M

MF-319

6-5-95

Developers

Shipley Microposit

MF-322

2-10-92

Developers

Shipley Microposit

MF CD-14

2-4-98

Developers

Shipley Megaposit

MF CD-26

2-4-97

Developers

Shipley Microposit

Mesitylene

7-99

Solvents

(in Cyclotene 3022)

Methane (CH₄)

10-1-85

Bubblers & Gases

(pecvd, stsdep)

Methyl Alcohol (Methanol)

3-16-99

Solvents

Methylene Chloride

3-1-97

Solvents

Methyl ethyl ketone (MEK)

3-16-99

Solvents

Methyl iso butyl ketone (MIBK)

4-9-97

Solvents

Microposit Developer Concentrate

3-23-92

Developers

Shipley Microposit

N

NR7-3000 Negative Resist

1-19-99

Coatings - Resists

Futurex

NR5-8000 Negative Resist

4-27-98

Coatings - Resists

Futurex

NR8-1000 Negative Resist

1-19-99

Coatings - Resists

Futurex

NR8-3000 Negative Resist

8-30-93

Coatings - Resists

Futurex

Nickel Etchant TFB

4-12-91

Etchants

Transene

Nickel Etchant Type I

4-87

Etchants

Transene

Nitric Acid

8-15-97

White Binder

Nitrogen, House

9-28-99

Bubblers & Gases

(service yard)

Nitrogen, Liquid

9-28-99

Bubblers & Gases

(L119)

Nitrogen Trifluoride (NF₃)

4-92

Bubblers & Gases

(amtetcher)

Nitrous Oxide (N₂O)

11-1-98

Bubblers & Gases

(PSW, stsdep)

N-Methyl-2-pyrrolidinone (NMP)

9-27-97

Solvents

Norland Optical Adhesive

08-27-99

Coatings – Resists

Norland Products Inc

O

OCG Developer 934 70%

6-8-92

Developers

Olin

Oxygen, House

9-28-99

Bubblers & Gases

(service yard)

Oxygen 20% in He

9-28-99

Bubblers & Gases

(basement)

PQ

PAD Etch I

11-97

Etchants

PC3-1500 (Planarizing)

11-98

Coatings - Polyimides

Futurex

PC3-6000 (Planarizing)

10-15-91

Coatings - Polyimides

Futurex

PD Developer

Developers

Pyralin

PD Rinse

Developers

Pyralin

PI2734 Polyimide

4-7-97

Coatings - Polyimides

Pyralin

PIQ

Coatings - Polyimides

Hitachi

PIQ Coupler 3

11-85

Coatings - Polyimides

Hitachi

PMGI SF6

6-13-96

Coatings - Resists

PMMA 200 C5

Coatings - Resists

PMMA 5% (496K Standard)
& 9% (950K)

11-11-85

Coatings - Resists

PRS1000

8-1-92

Removers & Strippers

Phosphine (PH₃) 1% in H₂

9-28-99

Bubblers & Gases

(epi)

Phosphine (PH₃) 15% in H₂

9-28-99

Bubblers & Gases

(implanter)

Phosphine (PH₃) 15% in Silane

9-28-99

Bubblers & Gases

(tylanbpsg)

Phosphoric Acid (H₃PO₄F), 85%

2-7-97

White Binder

Phosphorus Oxycloride (POCL₃)

9-95

Bubblers & Gases

(tylan6)

Photo Definable Polyimide

Coatings - Polyimides

Photo-flo 200 Solution

12-17-97

White Binder

Kodak

Platinum

4-3-95

White Binder

(Metalica, Innotec)

Polymerized 1,2-Dihydro-
2,2,4-Trimethylquinoline

9-10-98

White Binder

(in Cyclotene 3022)

Polyimide Percursor Resin

Coatings -- Polyimides

Brewer

Polyimide Resins

9-10-98

White Binder

Pyraline

Potassium Hydroxide (KOH), 45%

12-8-96

White Binder

PropyleneGlycolMonomethylEther

See: 1-Methoxy-2-propanol

PropyleneGlycolMonomethyl
EtherAcetate (PGMEA)

9-10-98

Solvents

PRX-127

1/5/2000

Removers & Strippers

Silicon Valley Chemlabs

Pump Oil (white oil)

White Binder

R

RD2

9-19-89

Developers

Futurex

RD5

2-13-97

Developers

Futurex

RI 9180

7-14-97

Developers

HD MicroSystems

RR2

?

Removers & Strippers

Futurex

S

SAL 601

3-4-92

Coatings - Resists

Shipley Microposit

SPR 220 (0.7 - 7.0)

2-8-99

Coatings - Resists

Shipley Megaposit

SPR 3612

2-7-96

Coatings - Resists

Shipley Megaposit

SPR 955 (CM 0.5)

1-19-99

Coatings - Resists

Shipley Megaposit

SPR 955 (CM 0.9)

3-21-99

Coatings - Resists

Shipley Megaposit

SPR 3001

11-12-97

Coatings - Resists

Shipley Megaposit

SR5 Edge Bead Remover

8-11-97

Removers & Strippers

Shipley Megaposit

Silane (SiH₄)

9-28-99

Bubblers & Gases

(epi, lpcvd tylans)

Silane (SiH₄) 2% in Ar

9-28-99

Bubblers & Gases

(stsdep)

Silane (SiH₄) 2% in N₂

9-28-99

Bubblers & Gases

(stsdep)

Silicon Dioxide (SiO₂)

7-25-86

White Binder

Silicon Hexafluoride (SF₆)

6-83

Bubblers & Gases

(in basement)

Sodium Bicarbonate

11-6-85

White Binder

(in basement)

Sodium Carbonate, anhydrous

4-9-94

White Binder

Sulfur

12-8-98