Approximate Exposure Times
Exposure times depend on the conditions of preparation and other variables so please run a test run to verify the time is correct. We also recommend that you check the exposure logsheets located next to each aligner.
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ULTRATECH 1um 3612 90mj |
ULTRATECH 1.6um 3612 130mj |
ULTRATECH 7um AZ4620 880mj |
ULTRATECH 7um SPR220-7 440mj |
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KARLSUSS CI1 15mw/cm2 1um 3612 1.0-1.2 sec |
KARLSUSS CI1 15mw/cm2 1.6um 3612 1.4-1.6 sec |
KARLSUSS CI1 15mw/cm2 7um AZ4620 (discontinued) 20 sec |
KARLSUSS CI1 15mw/cm2 7um SPR220-7 8-10 sec |
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CI2 30mw/cm2 1um 3612 0.9 sec
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CI2 30mw/cm2 1.6um 3612 1.0 sec |
CI2 30mw/cm2 7um AZ4620 12 sec |
CI2 30mw/cm2 7um SPR220-7 7 sec |
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EVALIGN CI1 15mw/cm2 1um 3612 1.0-1.2 sec |
EVALIGN CI1 15mw/cm2 1.6um 3612 1.4-1.6 sec |
EVALIGN CI1 15mw/cm2 7um AZ4620 20 sec |
EVALIGN CI1 15mw/cm2 7um SPR220-7 8-10 sec |
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Stanford Nanofabrication Facility Last Modified 09/08/2003 |