Making Mylar Masks

    Mylar or transparency masks are a very inexpensive, quick-turnaround alternative to conventional Cr masks, for defining non-critical features. Using a 3600 or better, photoreproduction quality laser printer, you can generate a transparency with geometries defined down to the tens of microns in resolution. Design your mask layout using any drawing program that produces an EPS (Encapsulated PostScript) file. Although EPS is preferred, you can also design your layout in Illustrator (check with the vendor for preferred type). John Lee (a former SNF labmember, now a professor at San Jose State) has a very nifty website describing how to use AutoCAD for generating PostScript files. Here are a couple of print shops which can provide this service.

    EPS and Illustrator files are accepted. Output printer is up to 3800 dpi, depending on the data received. Quality Kodak film is used. Stanford University affiliates get special pricing. (You must mention that you are with Stanford.) There is a minimum order (around $50). A typical single mask printout will be $15-$20.

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Stanford Nanofabrication Facility
Last Modified 01/02/2007