|
|
|
| Area | Equipment/Process |
Qualification Procedure
|
Data Trends
|
| Furnaces | tylan1 | ||
| tylan2 | |||
| tylan3 | |||
| tylan4 | |||
| tylanbpsg | |||
| tylannitride | |||
| tylanpoly | |||
| Etch | amtetcher | ||
| drytek2 |
<go>
|
||
| stsetch |
<go>
|
||
| Litho |
Contact Aligners |
<go>
|
|
| Ultratech |
<go>
|
|
_______________________________________________________________
Stanford Nanofabrication Facility webmaestro@snf.stanford.edu Last Modified 07/06/2007 |