Implant Services

Nu Ions
685 East Brokaw Rd San Jose, CA 95112
(408)437-5761
(for Boron implants they do B10, B11, BF, BF2 cost is 250 for up to 25 wafers. for doses up to 5e15 and energies between 40-90 keV. For low doses below 5e15 they will increase the energy for the same cost.)

Innovion (formerly Ion Implant Services and Implant Center)
2121 Zanker Rd. San Jose, CA 95131
Contact: Randy Graf, rgraf@innovion.cc
408/501-9190

Core Systems - A Division of Implant Science
1050 Kifer Rd. Sunnyvale, Ca 94086
Tel: 408 328 1340
Providing a wide range of implant species (>55) as well as special heated or cooled platens (from -120C to +600C+) are available – along with process support for recipe development. We also provide assistance to grad students who might need recipe development support. We understand that ion implant, for many of these students or experimenters, is one of many steps in a long process.

Cutting Edge Ions
Specialty implants/species
Brian Doherty & Mike Kroko
Tel: 714-505-4901
briandoherty@cuttingedgeions.com
www.cuttingedgeions.com
(These guys got our old Varian 350D!)

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Stanford Nanofabrication Facility
webmaestro@snf.stanford.edu
Last Modified 04/19/2007