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Nu Ions
685 East Brokaw Rd San Jose, CA 95112
(408)437-5761
(for Boron implants they do B10, B11, BF, BF2 cost is 250 for up to 25
wafers. for doses up to 5e15 and energies between 40-90 keV. For low doses
below 5e15 they will increase the energy for the same cost.)
Innovion (formerly
Ion Implant Services and Implant Center)
2121 Zanker Rd. San Jose, CA 95131
Contact: Randy Graf, rgraf@innovion.cc
408/501-9190
Core Systems
- A Division of Implant Science
1050 Kifer Rd. Sunnyvale, Ca 94086
Tel: 408 328 1340
Providing a wide range of implant species (>55) as well as special
heated or cooled platens (from -120C to +600C+) are available along
with process support for recipe development. We also provide assistance
to grad students who might need recipe development support. We understand
that ion implant, for many of these students or experimenters, is one
of many steps in a long process.
Cutting Edge
Ions
Specialty implants/species
Brian Doherty & Mike Kroko
Tel: 714-505-4901
briandoherty@cuttingedgeions.com
www.cuttingedgeions.com
(These guys got our old Varian 350D!)
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